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2014
Conference Paper
Titel
Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits
Abstract
This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.