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Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile

: Fell, A.; Hopman, S.; Vago, N.; Kluska, S.; Franklin, E.; Weber, K.J.


Optical Society of America -OSA-, Washington/D.C.:
Optics for solar energy 2014 : Part of Light, energy and the environment; 2 - 5 December 2014, Canberra, Australia
Washington, DC: OSA, 2014
ISBN: 978-1-55752-756-1
Paper RW4B.5
Conference "Optics for Solar Energy" (OSE) <2014, Canberra>
Conference "Light, Energy and the Environment" <2014, Canberra>
Fraunhofer ISE ()

A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.