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Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy

: Tortschanoff, A.; Kremer, M.; Sandner, T.; Kenda, A.


Druy, M.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Next-generation spectroscopic technologies VII : 5 - 6 May 2014, Baltimore, Maryland, United States
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 9101)
ISBN: 978-1-62841-038-9
Paper 910109, 8 S.
Conference "Next-Generation Spectroscopic Technologies" <7, 2014, Baltimore/Md.>
Fraunhofer IPMS ()

One of the important challenges for widespread application of MOEMS devices is to provide a modular interface for easy handling and accurate driving of the MOEMS elements, in order to enable seamless integration in larger spectroscopic system solutions. In this contribution we present in much detail the optical design of MOEMS driver modules comprising optical position sensing together with driver electronics, which can actively control different electrostatically driven MOEMS. Furthermore we will present concepts for compact spectroscopic devices, based on different MOEMS scanner modules with lD and 2D optical elements.