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MEMS-mirror tilt-detection based on a quadrant diode scheme

 
: Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Mayer, Ch.; Sandner, T.

International Measurement Confederation -IMEKO-, Technical Committee on Photonics -TC 2-:
21st IMEKO TC2 Symposium on Photonics in Measurement 2013 : Gdansk, Poland, 16 - 18 September 2013
Red Hook, NY: Curran, 2013
ISBN: 978-1-63266-547-8
S.14-18
International Symposium on Photonics in Measurement (ISPM) <21, 2013, Gdansk>
Englisch
Konferenzbeitrag
Fraunhofer IPMS ()

Abstract
In this contribution, we present in much detail the characteristics of a novel optical position detection device for micro-scanners. We show first experimental results as well as theoretical considerations and optical simulations.

: http://publica.fraunhofer.de/dokumente/N-350731.html