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Surface passivation of black silicon by thermal ALD deposited aluminum oxide

: Otto, M.; Kroll, M.; Käsebier, T.; Ernst, M.; Salzer, R.; Wehrspohn, R.B.


Optical Society of America -OSA-, Washington/D.C.:
Solid-state and organic lighting : Part of Renewable energy and the environment, 2 - 3 November 2011, Austin, Texas, United States
Washington, DC: OSA, 2011 (OSA Technical digest series)
ISBN: 9781557529206
Paper JWE7
Conference "Solid-State and Organic Lighting" (SOLED) <2011, Austin/Tex.>
Renewable Energy and the Environment Congress <2011, Austin/Tex.>
Fraunhofer IWM ()

Black silicon (bSi) surfaces can be effectivly passivated by thermal ALD. The nanosturcures with aspect ratios up to 10 show excellent anti-reflection and light-trapping properties with absorption in the visible spectrum of over 97%.