Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Processing, materials, and integration of damascene and 3D interconnects: Preface

 
: Flake, J.; Ritzdorf, T.; Koyangi, M.; Leonte, O.; Mathad, G.S.; Ramm, P.; Rathore, H.S.; Roozeboom, F.

Processing, materials, and integration of damascene and 3D interconnects (2010)
ISBN: 978-1-60768-181-6
Symposium Processing, Materials, and Integration of Damascene and 3D Interconnects <2010, Las Vegas/Nev.>
Electrochemical Society (Meeting) <218, 2010, Las Vegas/Nev.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/N-350145.html