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Fabrication of metal-based nanoporous structures

 
: Lin, Y.-C.; Chen, P.-C.; Chen, L.Y.; Chen, M.W.; Esashi, M.; Gessner, T.

Gessner, T.:
Smart systems integration 2010. 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM : Como, Italy, 23 - 24 March 2010
Berlin: VDE-Verlag, 2010
ISBN: 978-3-8007-3208-1
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <4, 2010, Como>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
This study has introduced two simple micro/nano technology compatible nanostructure fabrications. Nanochannel-structured porous alumina can be performed with anodic oxidation and chemical etching. The nanochannel and pore size are determined by adjusting experimental parameters as well as anodizing voltage. The gold thin film with randomly nanoporous holes is fabricated with binary alloy deposition subsequently a dealloying process in which one metal is selectively dissolved. The porous size can be controlled with various dealloying time and temperature. These encouraging dimension-controllable easy-fabricated nanofabrications imply some possibilities for developing further micro/nano integratable application.

: http://publica.fraunhofer.de/dokumente/N-350075.html