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2005
Conference Paper
Titel
Flexible master structures made of SU-8 for double-sides moulding of PDMS
Abstract
The authors have shown the possibility and the process flow to create bendable SU-8 wafers with a defined surface topology and pointed out the crucial steps during processing of the SU-8 master. The application of SU-8 wafers as flexible master structures for double-sided moulding of PDMS was presented. The authors demonstrate the process and the equipment for double-sided moulding of PDMS and the removal of the structured SU-8 wafer at the end of the moulding process. One application for double-sided moulded PDMS is a new design of a micro plasma source based on the principle of dielectric barrier discharge. This plasma source operates at atmospheric pressure and uses the PDMS as patterned dielectric barrier. Managing the alignment of both master structures double-sided moulding of PDMS will give rise to high application potential in the field of microtechnology.