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Tabletop coherent diffraction imaging with a discharge plasma EUV source

: Juschkin, L.


Klisnick, A.; Menoni, C.S. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X : 27 - 29 August 2013, San Diego, California, USA
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8849)
ISBN: 978-0-8194-9699-7
Paper 88490Y, 9 S.
X-Ray Lasers and Coherent X-Ray Sources - Development and Applications Conference <2013, San Diego/Calif.>
Fraunhofer ILT ()

We present a coherent diffraction imaging (CDI) experiment using a high-frequency discharge plasma based, extreme ultraviolet (EUV) source. By using different illumination geometries, we generated EUV beams witha varying degree of spatial coherence, which were used to produce far field diffraction patterns from test objects. We then successfully reconstructed an illumination wavefront defined by a circular aperture. The present work explores the feasibility of compact tabletop CDI using a discharge plasma EUV source emerged from the technology development of EUV lithography, which can potentially find application in nanoscience and metrology.