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Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications

 
: Schürmann, Mark; Risse, Stefan; Kämmer, H; Franke, Christian; Schlegel, Ralph; Müller, Sandra; Damm, Christoph; Steinkopf, Ralf; Dreisow, F.; Nolte, Stefan; Eberhardt, Ramona; Kaiser, Norbert

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Klotzbach, Udo (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser-based Micro- and Nanoprocessing IX : 10-12 February 2015, San Francisco, California
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9351)
ISBN: 978-1-62841-441-7 (ISBN)
Paper 93510S, 11 S.
Conference "Laser-Based Micro- and Nanoprocessing" <9, 2015, San Francisco/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IOF ()

Abstract
Metal mirrors are an attractive solution for scan mirrors working with ultra-short pulse lasers. Small mechanical inertia and a small mirror mass are required. Therefore, the mirrors have to be very stiff and a high quality optical surface has to be provided. This can be achieved with lightweight AlSi based mirrors with diamond-turned NiP polishable plating.
Different coating options were evaluated in order to provide the necessary high reflectivity and a satisfactory laser damage threshold for ultrashort laser pulses in the few ps to fs regime at λ = 1030 nm. High-reflective metal layers enhanced by dielectric HfO2/SiO2 stacks were found to be the most advantageous coating option due to their comparatively small thickness and measured damage thresholds above 1 J/cm2@8ps.

: http://publica.fraunhofer.de/dokumente/N-345224.html