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Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera

: Sandner, T.; Baulig, C.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.; Dahlmann, H.-G.; Schwarzer, S.


Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XIV : 7 - 12 February 2014, San Francisco, California, USA
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9375)
ISBN: 978-1-62841-465-3
Paper 937505, 8 S.
Conference "MOEMS and Miniaturized Systems" <14, 2015, San Francisco/Calif.>
Fraunhofer IPMS ()
Fraunhofer IPM ()

This paper presents a large aperture micro scanning mirror (MSM) array especially developed for the novel 3D-laser camera Fovea3D. This 3D-camera uses a pulsed ToF technique with 1MVoxel distance measuring rate and targets for a large measurement range of 30 ... 100m and FOV of 120 degrees x60 degrees at video like frame rates. To guarantee a large reception aperture of >= 20mm, large FOV and 3200 Hz bi-directional scanning frequency at the same time, a hybrid assembled MSM array was developed consisting of 22 reception mirrors and a separate sending mirror. A hybrid assembly of frequency selected scanner elements and a driving in parametric resonance were chosen to enable a fully synchronized operation of all scanner elements. For position feedback piezo-resistive position sensors are integrated on each MEMS chip. The paper discusses details of the MEMS system integration including the synchronized operation of multiple scanning elements.