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Stress optimization of a micromechanical torsional spring

: Klose, T.; Kunze, D.; Sandner, T.; Schenk, H.; Lakner, H.; Schneider, A.; Schneider, P.

Nano Science and Technology Institute -NSTI-:
NSTI Nanotechnology Conference and Trade Show 2005. Vol.3: ICCN, MSM : NSTI Nanotech 2005, May 8 - 12, 2005, Anaheim Marriott & Convention Center, Anaheim, California, USA
Cambridge, Mass. [u.a.]: NSTI, 2005
ISBN: 0-9767985-4-9
Nanotechnology Conference and Trade Show (Nanotech) <2005, Anaheim/Calif.>
Fraunhofer IPMS ()
Fraunhofer EAS ()
MEMS; ANSYS; Moscito; optimization; torsional spring

In this paper we present a method for the design of a stress-optimized and reliable micromechanical torsional spring. Our optimization approach is based on a software tool for simulation-based optimization - MOSCITO, in combination with the FEM tool ANSYS r. For a specific spring geometry we successfully increase the maximal possible deflection by 30 percent, keeping a given limit for the stress.