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VUV optical coatings for the next-generation micro-mechanical mirrors

: Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H.


Amra,C.; Kaiser, N.; Macleod, H.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in Optical Thin Films II : SPIE Conference on Optical Systems Design, 12-16 September 2005, Jena, Germany
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5963)
ISBN: 0-8194-5981-X
Conference on Optical Systems Design <2005, Jena, Germany>
Fraunhofer IPMS ()
Fraunhofer IOF ()
vacuum UV; thin film; micro mirror; spatial light modulator

This paper deals with vacuum UV optical coatings for micro mirrors applications. High reflecting low-stress optical
coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are
applicable for the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light
modulators (SLM) and micro scanning mirrors.