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Tutorial: The new specification template and procedures for writing SEMI information and control standards

: Bricker, D.; Carrubba, M.; Crandell, B.; Dreiss, P.; Ghiselli, J.; Muckenhirn, R.; Rist, L.; Walsh, D.

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
SEMI Europe Standards Autumn Conference 2005 : SEMI International Standards Program. Equipment Automation Technical Committee. 26-28 October 2005, Leuven, Belgium
Leuven, 2005
47 S.
SEMI Europe (Standards Autumn Conference) <2005, Leuven, Belgien>
Fraunhofer IPA ()
SEMI International Standards; semiconductor; Standardisierung; standardization; Normung

This presentation shows the new approach in requirements engineering in semiconductor industries by defining methodologies for writing and implementing standards from SEMI. It is intended to provide significant improvement in the quality and implementability of these standards. Improve quality, format and consistency of content. Easily identify requirements and dependences between requirements. Detailed compliance tables to support implementations. Easy to migrate to tool specifications, purchase requirements, and test specifications. Easier to identify and track changes.