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Development of functionally integrated mounts for three- and six-axial vibration isolation of sensitive equipment

: Bartel, T.; Gaisbauer, Samuel; Stöhr, P.; Herold, S.; Melz, T.

Sas, P. ; Katholieke Universiteit Leuven, Departement Werktuigkunde:
ISMA 2014, International Conference on Noise and Vibration Engineering. Proceedings. CD-ROM : USD 2014, International Conference on Uncertainty in Structural Dynamics; 15 to 17 September, 2014, Leuven, Belgien
Leuven: Katholieke Universiteit Leuven, 2014
ISBN: 978-90-73802-91-9
International Conference on Noise and Vibration Engineering <26, 2014, Leuven>
International Conference on Uncertainty in Structural Dynamics (USD) <5, 2014, Leuven>
Fraunhofer LBF ()

The analyzing and manufacturing precision of devices working at nano and subnano scale is increasing continuously. For reduction of the influence of environmental vibration, active systems are used, effecting enhanced vibration isolation. Commonly used systems base on separate units as electro dynamic voice coils, structural components, sensors, actuator amplifiers and a controller unit. The integration of multifunctional elements additionally offers a reduction of complexity and a more compact design. Piezoelectric bimorph beams fulfill the demands on actuators and sensors used in an active isolation system.
In this work, the methodical development of functionally integrated elements is described. Basing on the known V-model, the single development steps of components are presented, that are required for the setup of an isolation platform. Consisting of different detailing levels, a flexible simulation environment supports the design process of the isolation system. In a first detailing level of the simulation environment, idealized components are used in order to investigate principle design parameters. Subsequently, models based on analytical, numerical or measured data are substituted.
As an example, the structure of the system simulation model and the single development steps of a piezoelectric bimorph actuator are presented. The simulation model follows the principle of admittance-impedance modeling, thus offering both an easy exchangeability of single components and the combination of electrical and mechanical model parts. The development steps include an analytical optimization procedure, the numerical and experimental verification and the derivation of simulation models. Within this, design and manufacturing possibilities for a mono- and a multiaxial bimorph actuator are proposed. Basing on a finite element model, the design concepts are included into the system simulation environment.
The applicability of the design methodology is demonstrated in the development process of both a three and a six degree of freedom vibration isolation device for sensitive equipment. Simulation and measurement results of both systems are given, proving the advantages of the isolation devices.