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EUV discharge lamp with moving protective component

: Prümmer, Ralf

Frontpage ()

EP 2816876 A1: 20130621
Patent, Elektronische Publikation
Fraunhofer ILT ()

Source: US2014374625A [EN] The present invention relates to an apparatus for generating EUV radiation and/or soft X-rays by means of an electrically operated discharge, in which a metal or metal melt is provided on a surface close to a discharge gap and evaporated by an energy beam, thereby generating a gaseous medium for ignition of a plasma. A protective component is arranged and shaped to cover at least one slit between parts of different electrical potential during operation. The protective component is moved during operation of the apparatus. Due to this movement the local heat load on the protective component is reduced.