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Optimized 9×2-inch MOVPE reactor for the growth of Al-containing antimonides
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2004
Journal Article
Titel
Optimized 9×2-inch MOVPE reactor for the growth of Al-containing antimonides
Author(s)
Dimroth, Frank
Bett, Andreas W.
Giesen, C.
Heuken, M.
Zeitschrift
Journal of Crystal Growth
DOI
10.1016/j.jcrysgro.2004.08.039
Language
English
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Fraunhofer-Institut für Solare Energiesysteme ISE
Tags
Epitaxie
Epitaxie MOVPE