Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%

: Grahmann, J.; Merten, A.; Herrmann, A.; Ostendorf, R.; Bleh, D.; Drabe, C.; Kamenz, J.


Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XIV : 7 - 12 February 2014, San Francisco, California, USA
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9375)
ISBN: 978-1-62841-465-3
Paper 93750W, 9 S.
Conference "MOEMS and Miniaturized Systems" <14, 2015, San Francisco/Calif.>
Fraunhofer IAF ()
external cavity; scanning grating; QCL; tunable laser source; micro mirror

Experimental results of a large scanning grating with a diameter of 5mm and 1 kHz scan frequency are discussed. An optical diffraction grating is fabricated on a mirror single crystal silicon plate to scan the first diffraction order in the MIR-wavelength range over a quantum cascade laser facet. Special emphasis is on the development of the grating technology module to integrate it with high accuracy and reproducibility into the IPMS AME75 process flow. The principle EC-QCL setup with the scanning grating is described and first measurement results concerning laser output power and tuning range are presented.