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Large area deposition of superhard carbon films



Vakuum in Forschung und Praxis 17 (2005), Nr.S1, S.20-25
ISSN: 0947-076X
Fraunhofer IWS ()

During the 1990s, the Laser-Arc technology for the deposition of superhard amorphous carbon films (Diamor®) was developed at the Fraunhofer Institute for Material and Beam Technology. This technology has now been scaled up by a factor of 4 compared to existing devices and integrated in an industrial large-volume vacuum arc coater. Initial results demonstrate the possibility of depositing well adherent Diamor® films with a thickness of more than 2 microns and a hardness above 4000 HV on larger parts and tools. This opens up a wide field of industrial applications.