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2005
Conference Paper
Titel
Reel-to-reel fabrication of integrated circuits based on soluble polymer semiconductor
Abstract
Within this work a process for manufacturing integrated circuits based on solution processed polymer semiconductors has been developed. Basis is a reel-to-reel working photolithographic patterning process for metallized foils, which is used to fabricate the basic source-drain layer with high resolution. By two subsequent lacquering and three screen printing steps polymer field effect transistors are integrated to circuits.