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Novel 3D-scanner based on electrostatically driven resonant micromirrors

: Schelinski, U.; Gerwig, C.; Neumann, H.; Dallmann, H.-G.; Kleinmann, L.; Nauber, P.; Wolter, A.; Bergmann, A.; Scholles, M.


Sagan, S.F. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical scanning 2005 : 31 July - 1 August 2005, San Diego, California, USA
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5873)
ISBN: 0-8194-5878-3
Conference on Optical Scanning <2005, San Diego/Calif.>
Fraunhofer IPMS ()
3D-scanner; micromirror; triangulation; MEMS; MOEMS; measurement

This contribution presents a new scanning principle and device for 3-dimensional digital capturing and measurement of objects based on the triangulation method. The key elements are MOEMS, in particular electrostatically excited, harmonically oscillating micromechanical mirrors, which are useful means for light projection as well as for light detection. A configuration for capturing the trace of a static illumination is described, which applies a micro scanning mirror that oscillates in two axes. A synchronization method is proposed in order to apply micro scanning mirrors for both patterned illumination and light detection. For proving both techniques a test setup has been designed and assembled, and first results based on a static illumination are outlined.