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Laser-assisted structuring for the fabrication of thin film sensors on complex 3D-surfaces

: Biehl, S.; Lüthje, H.; Bandorf, R.

Eurosensors XIX. Proceedings. Vol.2: W : Barcelona, Spain, 11th - 14th September 2005
Barcelona, 2005
Paper WPb21
Eurosensors <19, 2005, Barcelona>
Fraunhofer IST ()
microsensor; laser; flexible mask

Micro-structuring of thin metal layers on three-dimensional surfaces of various machining parts and tools is an important task for innovative developments in microsystem technology. Since standard photolithographic methods can not be used in this cases we investigated direct pattering processes by use of a flexible laser system. It is a simple, but effective method based on laser written polymeric stencil masks, which were fixed to the 3-D machining parts by gluing. The masks were then used for lift-off preparation of microstructures in magnetron sputtering processes. This paper will deal with the fabrication of micro structures and micro sensors on macro parts. Detailed results will be presented for ball bearings with surface integrated load and temperatures sensors in the race track.