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MEMS Metallization

 
: Lohmann, C.; Gottfried, K.; Bertz, A.; Reuter, D.; Hiller, K.; Kuhn, M.; Gessner, T.

Carter, R.J. ; Materials Research Society -MRS-:
Materials, technology and reliability for advanced interconnects and low-k dielectrics 2004 : Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A.; Papers presented at Symposium F, held at the 2004 MRS spring meeting
Warrendale, Pa.: Materials Research Society, 2004 (Materials Research Society symposia proceedings 812)
ISBN: 1-558-99762-8
S.233-242
Symposium F: "Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics" <2004, San Francisco/Calif.>
Materials Research Society (Spring Meeting) <2004, San Francisco/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-32915.html