English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
MEMS Metallization
Details
Full
Export
Statistics
Options
2004
Conference Paper
Titel
MEMS Metallization
Author(s)
Lohmann, C.
Gottfried, K.
Bertz, A.
Reuter, D.
Hiller, K.
Kuhn, M.
Gessner, T.
Hauptwerk
Materials, technology and reliability for advanced interconnects and low-k dielectrics 2004
Konferenz
Symposium F: "Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics" 2004
Materials Research Society (Spring Meeting) 2004
Language
English
google-scholar
View Details
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM