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Challenges of current and future advanced interconnect systems for integrated circuits
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2014
Book Article
Titel
Challenges of current and future advanced interconnect systems for integrated circuits
Author(s)
Schulz, Stefan E.
Ahner, N.
Fischer, Tobias
Koerner, H.
Oszinda, T.
Schulze, K.
Zimmermann, Sven
Hauptwerk
Smart systems integration for micro- and nanotechnologies
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS