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AIM technology and devices - from basic research to industrial proven MEMS platform
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2014
Book Article
Titel
AIM technology and devices - from basic research to industrial proven MEMS platform
Author(s)
Bertz, Andreas
Reuter, Danny
Nowack, M.
Hauptwerk
Smart systems integration for micro- and nanotechnologies
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS