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Sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass for improved contour accuracy

: Gerhard, C.; Dammann, M.; Wieneke, S.; Viöl, W.

Postprint (1 MByte; PDF; )

Micromachines 5 (2014), Nr.3, S.408-419
ISSN: 2072-666X
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IST ()
atmospheric pressure plasma; laser ablation; hybrid ablation; photovoltaic glass; contour accuracy

In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the near-surface glass network by a chemical reduction and the implantation of hydrogen. As a result, the transmission at a wavelength of 355 nm was reduced by approximately 2% after plasma treatment duration of 60 min. Further, the surface polarity was increased by approximately 78%, indicating an increase of the near-surface index of refraction. Subsequently to the plasma pre-treatment, the samples were laser ablated applying the above-mentioned laser wavelength of a Nd:YAG nanosecond laser. Compared to untreated samples, a significant decrease of the form error by 45% without any mentionable change in the ablation rate was obtained in the case of pre-treated samples. For comparison, the results and findings are discussed with respect to previous work, where the presented plasma-assisted ablation procedure was applied to optical glasses.