Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Application of molecular dynamics to the simulation of IPVD

 
: Belsky, P.; Streiter, R.; Wolf, H.; Gessner, T.

Erb, D. ; Univ. of California, Continuing Education in Engineering; Materials Research Society -MRS-:
Advanced Metallization Conference, AMC 2004 : Proceedings of the conference held October 19 - 21, 2004, in San Diego, California, U.S.A. and September 28 - 29, 2004, University of Tokyo, Tokyo, Japan
Warrendale, Pa.: MRS, 2004
ISBN: 1-558-99814-4
S.787-792
Advanced Metallization Conference (AMC) <21, 2004, San Diego/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-32754.html