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Application of molecular dynamics to the simulation of IPVD
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2004
Conference Paper
Titel
Application of molecular dynamics to the simulation of IPVD
Author(s)
Belsky, P.
Streiter, R.
Wolf, H.
Gessner, T.
Hauptwerk
Advanced Metallization Conference, AMC 2004
Konferenz
Advanced Metallization Conference (AMC) 2004
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM