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Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films
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2005
Journal Article
Titel
Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films
Author(s)
Paskaleva, A.
Bauer, A.
Lemberger, M.
Zeitschrift
Microelectronics reliability
DOI
10.1016/j.microrel.2004.12.018
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB