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Optical characterization of patterned thin films

: Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.


Thin solid films 571 (2014), Part 3, S.601-604
ISSN: 0040-6090
International Conference on Spectroscopic Ellipsometry (ICSE) <6, 2013, Kyoto>
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer IISB ()

The present study investigates the use of imaging and mapping ellipsometry to determine the properties of non-ideal and patterned thin film samples. Samples which are candidates for future references and standards were prepared for this purpose. The samples investigated were lithographically patterned SiO2 and photoresist layers. The thickness and the optical constants of the two materials were determined using spectroscopic ellipsometry in the visible spectral range. On a larger lateral scale of several mm lateral resolution, the homogeneity was investigated using a goniospectral rotating compensator ellipsometer. A nulling imaging ellipsometer was used to determine the properties of the sample on a smaller scale of 25-150 mu m.