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Processing of nanoscale gaps for boron-doped nanocrystalline diamond based MEMS

: Iankov, D.; Zürbig, V.; Pletschen, W.; Giese, C.; Iannucci, R.; Ambacher, O.; Lebedev, V.

Postprint (PDF; )

Procedia Engineering 87 (2014), S.903-906
ISSN: 1877-7058
European Conference on Solid-State Transducers (Eurosensors) <28, 2014, Brescia>
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer IAF ()
MEMS; nanocrystalline diamond; microplate; nanoscale gaps

In this work we present a technological process flow enabling fabrication of transversal nanofeatures in nanocrystalline diamond based MEMS. Growth of thin diamond films on nanostructured templates, projection exposure lithography and bi-layer electron beam lithography are the key technologies used. Electrode gaps in the order of 100 nm have been successfully accomplished with suspended microplates with dimensions of 1×1 µm(2).