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Material properties characterization of BiCMOS BEOL metal stacks for RF-MEMS applications
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2012
Conference Paper
Titel
Material properties characterization of BiCMOS BEOL metal stacks for RF-MEMS applications
Author(s)
Wietstruck, M.
Kaynak, M.
Zhang, W.
Wolansky, D.
Kurth, Steffen
Erler, B.
Tillack, B.
Hauptwerk
Novel RF MEMS Technologies
Konferenz
International Symposium on RF MEMS and RF Microsystems (MEMSWAVE) 2011
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS