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Cluster of Excellence MERGE - Integration of Micro- and Nanosystems in Hybrid Structures
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2014
Book Article
Titel
Cluster of Excellence MERGE - Integration of Micro- and Nanosystems in Hybrid Structures
Author(s)
Kroll, L.
Troeltzsch, J.
Schueller, M.
Hauptwerk
Smart systems integration for micro- and nanotechnologies
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS