Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy

	MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM : Held in Chemnitz, Germany, from March 2-5, 2014, Annual Workshop Devoted to Materials Research, Materials Properties and Interactions Chemnitz: Technische Universität Chemnitz, 2014
	Workshop on "Materials for Advanced Metallization" (MAM) <23, 2014, Chemnitz>

	Englisch
	Konferenzbeitrag
	Fraunhofer ENAS ()