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Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS
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2009
Conference Paper
Titel
Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS
Author(s)
Gastinger, K.
Haugholt, K.H.
Røyset, A.
Albero, J.
Zeitner, U.
Gorecki, C.
Hauptwerk
Fringe 2009, 6th International Workshop on Advanced Optical Metrology
Konferenz
Fringe, International Workshop on Advanced Optical Metrology 2009
DOI
10.1007/978-3-642-03051-2-104
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF