
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. ALD of Nickel Oxide and its Reduction to Nickel for Potential Applications in Interconnects and Spintronics
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Wächtler, T.; Sharma, A.; Ahner, N.; Melzer, M.; Mueller, S.; Lehmann, D.; Schäfer, P.; Schulze, S.; Schulz, S.E.; Zahn, D.R.T.; Hietschold, M.; Gessner, T. | MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM : Held in Chemnitz, Germany, from March 2-5, 2014, Annual Workshop Devoted to Materials Research, Materials Properties and Interactions Chemnitz: Technische Universität Chemnitz, 2014 |
| Workshop on "Materials for Advanced Metallization" (MAM) <23, 2014, Chemnitz> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS () |