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Laser interference induced nano-crystallized surface swellings of amorphous carbon for advanced micro tribology

: Roch, Teja; Klein, Frederik; Guenther, Katja; Roch, Aljoscha; Mühl, Thomas; Lasagni, Andrés


Materials Research Express 1 (2014), Nr.3, Art. 035042, 14 S.
ISSN: 2053-1591
Deutsche Forschungsgemeinschaft DFG
SPP 1676-Trockenumformen-Nachhaltige Produktion durch Trockenbearbeitung in der Umformtechnik;
Fraunhofer IWS ()
thin film; carbon; patterning

We have investigated the direct laser interference patterning (DLIP) of tetrahedral amorphous carbon (ta-C) thin films in the nanometer region. In this paper we achieved texturing of ta-C from a surface swelling either by a phase change from sp3 to sp2 or thin film delamination. In contrast to surface ablation, the thin film is not removed from the silicon surface. With this technique a surface nano-swelling of ta-C with an area-speed of 1 m2 min−1 and nanometric resolution can be realized. The phase changes in the ta-C, due to DLIP material heating are undermined by thermal simulations of the patterning process. Additionally we investigated for the first time the influence of periodic nano-swelling on the coefficient of friction (COF). The COF of periodic graphitized surfaces was found to be lower (~50%) compared to as grown ta-C. This reduction of the COF can be attributed to a reduced area of contact.