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Quasi-static microscanner with linearized scanning for an adaptive 3D-lasercamera

: Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schenk, H.


AMA Fachverband für Sensorik e.V., Wunstorf:
AMA Conferences 2013. Proceedings. With SENSOR, OPTO, IRS 2. CD-ROM : Nürnberg Exhibition Centre, Germany, 14. - 16.5.2013
Wunstorf: AMA Service, 2013
ISBN: 978-3-9813484-3-9
International Conference on Sensors and Measurement Technology (SENSOR) <16, 2013, Nuremberg>
Fraunhofer IPMS ()

This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5mm a synchronized driven MEMS scanner array - consisting of five hybrid assembled MEMS devices - are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3…5mm at 7.5m measuring range for a gray target.