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Micromachined IR-source with excellent blackbody like behaviour

: Konz, W.; Hildenbrand, J.; Bauersfeld, M.-L.; Hartwig, S.; Lambrecht, A.; Lehmann, V.; Wöllenstein, J.


Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart Sensors, Actuators, and MEMS II : 9-11 May 2005, Sevilla, Spain
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5836)
ISBN: 0-8194-5831-7
Conference "Microtechnologies for the New Millennium" <2005, Sevilla>
Fraunhofer IPM ()
IR-emitter; macro-porous silicon; black body radiation; planar thermal source; thermal emitter

There are several micro sized thermal emitters commercially available, but compared with an ideal black body radiator, their emissivity and thus the emitted radiation is moderate. This was the motivation to develop a novel type of micromachined thermal IR-emitters. The main difference compared with common thermal micro emitters is the use of 2D structured bulk silicon. The regular ordered macropores of the emitters are obtained by electrochemical etching of prepatterend silicon substrates. Typical pore diameter of the fabricated photonic-crystal-like structures are in the range of 2.5 µm to 30 mum.
The macroporous silicon shows a black-body-like emission profile for a wide wavelength range.