Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Thermographic Testing Methods with High Temporal and Spatial Resolution

 
: Netzelmann, U.; Walle, G.; Karpen, W.; Meyendorf, N.

Michel, B.; Winkler, T.; Werner, M.; Fecht, H.-J. ; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin; Deutscher Verband für Materialforschung und -prüfung e.V. -DVM-, Berlin:
MicroMat 2000. Proceedings 3rd International Conference and Exhibition Micro Materials : April 17 - 19, 2000, Berlin, Germany
Dresden: ddp Goldenbogen, 2000
ISBN: 3-932434-15-3
S.1079-1081
Micro Materials (Micro Mat) <3, 2000, Berlin>
Englisch
Konferenzbeitrag
Fraunhofer IZFP ()
nondestructive testing; thermal wave; thermography; wafer

Abstract
Microstructures in semiconductors and in ferrite were imaged by pulsed thermography and by thermal wave microscopy. The lateral resolution ranges down to 50 µm for thermoagraphy and 5 µm respectively. The advantage of both techniques is their contact-free operation with ability to obtain sub-surface information.

: http://publica.fraunhofer.de/dokumente/N-3120.html