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Microoptical systems with nanometer-precision optical elements
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2004
Conference Paper
Titel
Microoptical systems with nanometer-precision optical elements
Author(s)
Bräuer, A.
Dannberg, P.
Schreiber, P.
Kudaev, S.
Duparré, J.
Gebhardt, A.
Hauptwerk
Nanofair 2004 - new ideas for industry
Konferenz
Nanofair 2004
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF