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Microstructure technology for optical component fabrication
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2004
Conference Paper
Titel
Microstructure technology for optical component fabrication
Author(s)
Kley, E.-B.
Wittig, L.-C.
Tünnermann, A.
Hauptwerk
Microoptics. From technology to applications
Konferenz
Heraeus Seminar on Microoptics 2002
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF