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Design strategy for a new high-g accelerometer

: Külls, R.; Nau, S.; Bohland, C.; Salk, M.; Thoma, K.


AMA Fachverband für Sensorik e.V., Wunstorf:
AMA Conferences 2013. Proceedings. With SENSOR, OPTO, IRS 2. CD-ROM : Nürnberg Exhibition Centre, Germany, 14. - 16.5.2013
Wunstorf: AMA Service, 2013
ISBN: 978-3-9813484-3-9
International Conference on Sensors and Measurement Technology (SENSOR) <16, 2013, Nuremberg>
International Conference on Optical Technologies for Sensing and Measurement (OPTO) <11, 2013, Nuremberg>
International Conference on Infrared Sensors & Systems (IRS2) <13, 2013, Nuremberg>
Fraunhofer EMI ()

A new piezoresistive high-g accelerometer is presented that was developed on the basis of an unconventional, displacement focused design approach. The approach analyses the geometrical constant, which describes the relation between the square of the resonant frequency and the displacement under static load of a spring-mass system. The value is maximized in order to achieve a high sensitivity, high bandwidth accelerometer. It has a figure of merit (sensitivity times resonant frequency squared) of about 5•106/m, which is higher than any other accelerometer in the literature or on the market. The design has been implemented as a MEMS device and has been characterized for shock loads up to 60,000 g. The concept of the geometrical constant may be applicable to other sensor types.