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At-wavelength metrology on Sc-based multilayers for the VUV and water window

 
: Schäfers, F.; Yulin, S.; Feigl, T.; Kaiser, N.

Duparre, A.; Singh, B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3 - 5 August 2003, San Diego, California, USA
Bellingham/Wash.: SPIE, 2003 (SPIE Proceedings Series 5188)
ISBN: 0-8194-5061-8
S.138-145
Conference on Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies <2003, San Diego/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IOF ()

: http://publica.fraunhofer.de/dokumente/N-31082.html