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Multi-Level MOEMS structures for spatial light modulators
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2014
Conference Paper
Titel
Multi-Level MOEMS structures for spatial light modulators
Author(s)
Mirabella, Simone
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Friedrichs, Martin
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Pufe, Wolfram
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
List, Matthias
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Hauptwerk
MME 2014, 25th Micromechanics and Microsystems Europe Workshop. CD-ROM
Konferenz
Micromechanics and Microsystems Europe Workshop (MME) 2014
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS