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Optical position detection for MOEMS scanner mirrors with arbitrary trajectories

: Tortschanoff, Andreas; Baumgart, Marcus; Holzmann, Dominik; Mayer, Christoph; Sandner, Thilo; Kenda, Andreas


IEEE Photonics Society; Institute of Electrical and Electronics Engineers -IEEE-:
International Conference on Optical MEMS and Nanophotonics, OMN 2014 : 17-21 August 2014, Glasgow, Scotland; Proceedings
Piscataway, NJ: IEEE, 2014
ISBN: 978-0-9928-4140-9 (Print)
ISBN: 978-0-9928-4141-6
ISBN: 978-0-9928-4142-3
ISBN: 978-1-4799-3737-0
International Conference on Optical MEMS and Nanophotonics (OMN) <2014, Glasgow>
Fraunhofer IPMS ()

For electrostatically driven MOEMS devices, which do not have intrinsic on-chip feedback, position information can be provided by optical methods, most simply by using a reflection from the backside of a MOEMS scanner. One possibility, which is applicable to arbitrary trajectories, is based on the measurement of the position of the back-reflected light with a quadrant diode. In this work, we present results from tests with a quadrant diode with a central hole, which provides robust results and enables a very compact design.