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Full-field X-ray microscopy with crossed partial multilayer Laue lenses

 
: Niese, Sven; Krüger, Peter; Kubec, Adam; Braun, Stefan; Patommel, Jens; Schroer, Christian G.; Leson, Andreas; Zschech, Ehrenfried

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Postprint (1.1 MByte; PDF; )

Optics Express 22 (2014), Nr.17, S.20008-20013
ISSN: 1094-4087
Englisch
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IKTS ()
Fraunhofer IWS ()
image plane; multilayer stacks; two-dimensional imaging

Abstract
We demonstrate full-field X-ray microscopy using crossed multilayer Laue lenses (MLL). Two partial MLLs are prepared out of a 48 μm high multilayer stack consisting of 2451 alternating zones of WSi2 and Si. They are assembled perpendicularly in series to obtain two-dimensional imaging. Experiments are done in a laboratory X-ray microscope using Cu-Kα radiation (E = 8.05 keV, focal length f = 8.0 mm). Sub-100 nm resolution is demonstrated without mixed-order imaging at an appropriate position of the image plane. Although existing deviations from design parameters still cause aberrations, MLLs are a promising approach to realize hard X-ray microscopy at high efficiencies with resolutions down to the sub-10 nm range in future.

: http://publica.fraunhofer.de/dokumente/N-309174.html