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High-rate vapor deposition and large systems for coating processes
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1987
Journal Article
Titel
High-rate vapor deposition and large systems for coating processes
Author(s)
Schiller, S.
Beister, G.
Heisig, U.
Förster, H.
Zeitschrift
Journal of vacuum science and technology A. Vacuum, surfaces and films
DOI
10.1116/1.574964
Language
English
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Fraunhofer-Institut fĂĽr Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP