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TiN hard coatings deposited on high-speed steel substrates by reactive direct current magnetron sputtering
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1987
Journal Article
Titel
TiN hard coatings deposited on high-speed steel substrates by reactive direct current magnetron sputtering
Author(s)
Schiller, S.
Beister, G.
Reschke, J.
Hötzsch, G.
Zeitschrift
Journal of vacuum science and technology A. Vacuum, surfaces and films
DOI
10.1116/1.574949
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP