English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputtering
Details
Full
Export
Statistics
Options
1984
Journal Article
Titel
Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputtering
Author(s)
Schiller, S.
Heisig, U.
Beister, G.
Steinfelder, K.
Strümpfel, J.
Korndörfer, C.
Sieber, W.
Zeitschrift
Thin solid films
DOI
10.1016/0040-6090(84)90196-2
Language
English
google-scholar
View Details
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP