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Metallization of ceramics for electronic components by magnetron-plasmatron coating
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1980
Journal Article
Titel
Metallization of ceramics for electronic components by magnetron-plasmatron coating
Author(s)
Schiller, S.
Heisig, U.
Steinfelder, K.
Mehr, D.
Thuss, B.
Petermann, R.
Zeitschrift
Thin solid films
DOI
10.1016/0040-6090(80)90013-9
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP